Quartz ring a wɔde yɛ etching mfiri .
Etching mfiridwuma yɛ adeyɛ a ɛyɛ den na ɛho hia kɛse wɔ semiconductor a wɔyɛ mu.
Ɛyɛ adeyɛ titiriw a wɔde yɛ nhwɛso (graphic processing) a ɛne lithography wɔ abusuabɔ.
Wɔde quartz rings di dwuma ma eyi.
Nkyerɛmu
Dwuma titiriw a quartz ring di ma etching nnwinnade .
Quartz rings yɛ nnwinnade titiriw wɔ dry etching nhyehyɛe no mu.Wɔasɔ awiei biako ano, na wɔde ano foforo no di dwuma de ma gas aduan. Quartz ring no dwumadi titiriw ne sɛ ɛbɛkyerɛ mframa a ɛyɛ adwuma no kwan akɔ ade a wɔrekyerɛw no ani so na wɔatew mfiri a wɔawie no afi nneɛma a wɔde gu mu no ho, na ɛnam so ahwɛ ahu sɛ etching no yɛ papa na ɛyɛ adwuma yiye. Sɛnea ɛbɛyɛ a wɔbɛbɔ nneɛma a wɔrekyerɛw no ho ban yiye no, ɛsɛ sɛ quartz ring no nso hwɛ hu sɛ asase ani yɛ mmerɛw na ɛyɛ tratraa na asiw ɔhaw ahorow te sɛ MIS-etching ne stick a ebetumi aba wɔ dry etching nhyehyɛe no mu no ano.
Etching nhyehyɛe no yɛ anammɔn a ɛyɛ den nanso ɛho hia kɛse wɔ semiconductor a wɔyɛ mu. Ɛyɛ patterning nhyehyɛe titiriw a ɛbata photolithography ho, na wɔde quartz rings di dwuma wɔ saa adeyɛ yi mu. Photolithography no hwehwɛ sɛ wɔde photoresist (a ɛne circuit diagram a wɔde kyerɛ wafer so kyerɛ no yɛ pɛ), bere a etching no fa nnuru anaa honam fam a woyi nneɛma a wɔmpɛ fi silicon wafer no mu fa nsusuwso a ɛkɔ so wɔ photoresist no ani so, na ɛnam so de circuit pattern no hyɛ wafer no so.
Wɔ saa adeyɛ yi mu no, ɛkorɔn-purity quartz rings titiriw som ahobammɔ adwuma. Sɛ wɔde quartz apon ka ho a, ɛma ahobammɔ a mframa ntumi nkɔ mu wɔ dan no mu, na atwa wafer no ho ahyia denneennen na esiw efĩ ano bere a wɔreyɛ etching no.
Mfaso a ɛwɔ quartz rings so ma etching mfiri .
1. Porrosion a ɛyɛ den a ɛko tia .
Quartz rings wɔ corrosion resistance a ɛkorɔn. Sɛ́ ɛyɛ mmeae a acid anaa alkaline wɔ mu, anaasɛ ɔhyew a ɛkɔ soro mu no, wɔn ani kɔ so yɛ petee na ɛyɛ mmerɛw, na ɛma etching no yɛ pɛpɛɛpɛ na ɛyɛ papa yiye.
2. Ɔsoro-Ɔhyew a ɛyɛ den .
Wɔ dry etching mu no, quartz rings no hyɛ ɔhyew a ɛkɔ soro ne radiation a ɛda adi. Anigyesɛm ne sɛ, quartz rings ma excellent soronko-temperature stability ne high radiation resistance, yiye bɔ nneɛma a wɔreyɛ etched no ho ban na ɛhwɛ ma etching quality.
3. Mfiridwuma mu ahoɔden a ɛkorɔn .
Quartz nkaa wɔ mfiri ahoɔden a ɛkorɔn, a etumi gyina akyi nhyɛso a ɛkorɔn ano na ɛko tia deformation ne breakage. Wɔ etching mmeae ahorow no, mfiri ahoɔden a ɛwɔ quartz rings mu no ma ne nkwa nna yɛ kɛse kɛse.
Tags a ɛyɛ hyew .: Quartz ring a wɔde yɛ etching mfiri, China quartz ring ma etching mfiri a wɔyɛ, wɔn a wɔde nneɛma ma, adwumayɛbea .
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